| Measuring Range(測量范圍): | | | |
| X-axis :300mm | | | |
| Y-axis :200mm | | | |
| Z-axis :150mm | | | |
| Measuring Uncertainty(測量): | | | |
| U2 (X,Y) = 2.0 + L/250 μm | | | |
| U1 (Z) = 2.5 + L/250 μm | | | |
| Resolution(分辨率): | | | |
| 0.5 μm | | | |
| System Construction(系統(tǒng)構(gòu)造): | | | |
| Precision lapped fine granite base(精密花崗巖平板) | | | |
| High precision cross table(度的十字桌) | | | |
| Moving stage(運動軸承) | | | |
| Drive System(驅(qū)動系統(tǒng)): | | | |
| Backlash free ball screws through m center(探頭中心螺絲抖動（重液壓）) | | | |
| Servo motor drive for CNC of 3 -axis(DC伺服馬達CNC的3軸伺服馬達) | | | |
| Precision Linear Motion guide system(精密線性運動指導(dǎo)系統(tǒng)) | | | |
| Positioning Speed(傳送速度): | | | |
| 0∼300mm/sec | | | |
| Max. acceleration(加速度): | | | |
| 500mm/s² | | | |
