被測件長度
Max. measured length | 150 mm |
工作臺行程
Lifting range of worktable | 5 mm |
| 測桿移動范圍 | 0.5mm |
| 分劃板刻度范圍 | &plun;50格 |
直接測量范圍
Measuring range | 5-20μm |
分度值調整范圍
Adjusting range of grad | 0.05-0.2 μm |
推薦使用分度值Recommended grad | 0.1 μm |
測量壓力
Measuring force | (1.5&plun;0.1) N |
儀器示值穩定性
Indication reliability | 0.02 μm |
儀器誤差
Indication error | 數字顯示
Dial display |
測量誤差
M ax.measurement error | | | | n 是格數, i是格值,λ是濾光片中心波長，△λ是濾光片波長誤差
n is number of divisions, i is division value △λ is error of wavelength |
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儀器體積Dimensions
| 280×500×700 mm |
儀器重量Weight | 40 kg |
標準配件
Standard attachments | | 五筋園臺Five-Rib circular stage
九筋瑪瑙臺Agate stage
可調園平臺Adjustable planar stage
輔助臺Auxiliary stage, fixed
平面測帽Planar contact tip, Ф2
小球面測帽all spherical contact tip
干涉濾光片 Wavelength filter | |
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