The UV Ozone cleaning method is a photo-sensitized damage free oxidation procs in which substrate surface contaminant molecul of photorists, rins, cleaning solvent ridu, silicone oils, etc. are excited and/or dissociated by the absorption of short wavelength UV radiation. Atomic oxygen is simultaneously generated when molecular oxygen is dissociated by 184.9nm and ozone by 253.7nm. The 253.7nm radiation is absorbed by most hydrocarbons and also by ozone. The products of this excitation of contaminant molecul react with atomic oxygen to form simpler volatile molecul which dorb from the substrate surface. When both wavelengths are prent, atomic oxygen is continuously generated and ozone is continually formed and dtroyed

UV ozone cleaner 紫外臭氧清洗機是一款美國UVOCS公司生產的潔凈表面清洗儀，可以去除硅油和油脂，助焊劑，殘留的光刻膠及其他多種溶劑殘留物等。在材料使用電解、電離或是聲清洗等工序后，UVOCS可以繼續清潔材料表面的殘留物。在傳統清洗工序后加入紫外臭氧清洗，產品表面的清潔度和性可以更高水平。紫外臭氧清洗工作原理：UVOCS使用低壓石英汞燈產生185-254nm范圍的紫外線。并在箱體內產生臭氧和等離子氧氣，材料殘余的污染物分子在吸收254nm波長的紫外臭氧后被激發或分解。激發的污染物可以和等離子氧反應形成氣體，比如CO2,H2O等。整個過程操作簡單，整個過程用時在10分鐘以內并沒有環境要求。

UVOCS 紫外臭氧清洗機的規格有10&tim;10 英寸（25.4&tim;25.4cm）和16&tim;16英寸（40.6&tim;40.6cm）兩種尺寸可選擇。